Micro-electro-mechanical systems (MEMS)--2003 : presented at the 2003 ASME International Mechanical Engineering Congress : November 15-21, 2003, Washington, D.C.

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Micro-electro-mechanical systems (MEMS)--2003 : presented at the 2003 ASME International Mechanical Engineering Congress : November 15-21, 2003, Washington, D.C.

co-sponsored by the MEMS Subdivision, ASME [and seven others] ; organized by Kimberly Turner [and six others]

（MEMS, vol. 5）

American Society of Mechanical Engineers, [2003] , , c2003

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MEMS-2003

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Content Type: text (ncrcontent), Media Type: unmediated (ncrmedia), Carrier Type: volume (ncrcarrier)

Includes bibliographical references and author index

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  • MEMS

    American Society of Mechanical Engineers

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