Micro-electro-mechanical systems--2004 : presented at 2004 ASME International Mechanical Engineering Congress and Exposition : November 13-19, 2004, Anaheim, California USA
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Micro-electro-mechanical systems--2004 : presented at 2004 ASME International Mechanical Engineering Congress and Exposition : November 13-19, 2004, Anaheim, California USA
(MEMS, vol. 6)
ASME, [2004] , , c2004
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Content Type: text (ncrcontent), Media Type: unmediated (ncrmedia), Carrier Type: volume (ncrcarrier)
"Book number: H01299"--P. 512
Includes bibliographical references and author index
