Micro-electro-mechanical systems--2005 : presented at 2005 ASME International Mechanical Engineering Congress and Exposition : November 5-11, 2005, Orlando, Florida USA
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Micro-electro-mechanical systems--2005 : presented at 2005 ASME International Mechanical Engineering Congress and Exposition : November 5-11, 2005, Orlando, Florida USA
(MEMS, vol. 7)
ASME, [2005] , , c2005
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Content Type: text (ncrcontent), Media Type: unmediated (ncrmedia), Carrier Type: volume (ncrcarrier)
Includes bibliographical references and author index