Micro-electro-mechanical systems--2006 : presented at 2006 ASME International Mechanical Engineering Congress and Exposition : November 5-10, 2006, Chicago, Illinois USA

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Micro-electro-mechanical systems--2006 : presented at 2006 ASME International Mechanical Engineering Congress and Exposition : November 5-10, 2006, Chicago, Illinois USA

sponsored by the Micro-Electro-Mechanical Systems Division, ASME

(MEMS, vol. 8)

ASME, [2007] , , c2007

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Content Type: text (ncrcontent), Media Type: unmediated (ncrmedia), Carrier Type: volume (ncrcarrier)

Includes bibliographical references and author index

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  • MEMS

    American Society of Mechanical Engineers

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