{"@context":{"owl":"http://www.w3.org/2002/07/owl#","bibo":"http://purl.org/ontology/bibo/","foaf":"http://xmlns.com/foaf/0.1/","rdfs":"http://www.w3.org/2000/01/rdf-schema#","prism":"http://prismstandard.org/namespaces/basic/2.0/","cinii":"http://ci.nii.ac.jp/ns/1.0/","dc":"http://purl.org/dc/elements/1.1/","dcterms":"http://purl.org/dc/terms/"},"@id":"https://ci.nii.ac.jp/ncid/BD18053523.json","@graph":[{"@id":"https://ci.nii.ac.jp/ncid/BD18053523#entity","@type":"bibo:Book","foaf:isPrimaryTopicOf":{"@id":"https://ci.nii.ac.jp/ncid/BD18053523.json"},"dc:title":[{"@value":"半導体の酸化機構と酸化膜"},{"@value":"ハンドウタイ ノ サンカ キコウ ト サンカマク","@language":"ja-hrkt"}],"dcterms:alternative":["New paradigm! on-demand publishing"],"dc:creator":"応用物理学会半導体分野将来基金委員会編","dc:publisher":[{"@value":"近代科学社Digital"},{"@value":"近代科学社","cinii:publisherRole":"distribution"}],"dcterms:extent":"402p","cinii:size":"26cm","dc:language":"jpn","dc:date":"2026","cinii:ncid":"BD18053523","cinii:ownerCount":"5","foaf:maker":[{"@type":"foaf:Person","foaf:name":[{"@value":"応用物理学会半導体分野将来基金委員会"},{"@value":"オウヨウ ブツリ ガッカイ ハンドウタイ ブンヤ ショウライ キキン イインカイ","@language":"ja-hrkt"}]},{"@id":"https://ci.nii.ac.jp/author/DA00633233#entity","@type":"foaf:Person","foaf:name":[{"@value":"応用物理学会"},{"@value":"オウヨウ ブツリ ガッカイ","@language":"ja-hrkt"}]}],"bibo:owner":[{"@id":"https://ci.nii.ac.jp/library/FA001109","@type":"foaf:Organization","foaf:name":"北海道大学 大学院工学研究科・工学部図書室","rdfs:seeAlso":{"@id":"https://opac.lib.hokudai.ac.jp/opac/opac_openurl/?ncid=BD18053523"}},{"@id":"https://ci.nii.ac.jp/library/FA001415","@type":"foaf:Organization","foaf:name":"東北大学 附属図書館 工学分館","rdfs:seeAlso":{"@id":"https://opac.library.tohoku.ac.jp/opac/opac_openurl/?ncid=BD18053523"}},{"@id":"https://ci.nii.ac.jp/library/FA005314","@type":"foaf:Organization","foaf:name":"芝浦工業大学 豊洲図書館","rdfs:seeAlso":{"@id":"https://library.shibaura-it.ac.jp/cgi-bin/search.cgi?ncid=BD18053523"}},{"@id":"https://ci.nii.ac.jp/library/FA005358","@type":"foaf:Organization","foaf:name":"上智大学 図書館","rdfs:seeAlso":{"@id":"https://www.lib.sophia.ac.jp/opac/opac_openurl?ncid=BD18053523"}},{"@id":"https://ci.nii.ac.jp/library/FA006678","@type":"foaf:Organization","foaf:name":"明治大学 図書館","rdfs:seeAlso":{"@id":"https://opac2018.lib.meiji.ac.jp/webopac/ufirdi.do?ufi_target=ctlsrh&ncid=BD18053523"}}],"prism:publicationDate":["2026.2",null],"cinii:note":["表現種別: テキスト (ncrcontent), 機器種別: 機器不用 (ncrmedia), キャリア種別: 冊子 (ncrcarrier)","奥付に「2026年2月27日 初版発行Ver.1.0」とあり","文献: 章末"],"dc:subject":["NDC9:549.8","NDC10:549.8","NDLC:ND371"],"foaf:topic":[{"@id":"https://ci.nii.ac.jp/books/search?q=%E5%8D%8A%E5%B0%8E%E4%BD%93","dc:title":"半導体"},{"@id":"https://ci.nii.ac.jp/books/search?q=%E9%85%B8%E5%8C%96%E3%83%BB%E9%82%84%E5%85%83","dc:title":"酸化・還元"},{"@id":"https://ci.nii.ac.jp/books/search?q=%E5%8D%8A%E5%B0%8E%E4%BD%93","dc:title":"半導体"},{"@id":"https://ci.nii.ac.jp/books/search?q=%E9%85%B8%E5%8C%96","dc:title":"酸化"}],"dcterms:hasPart":[{"@id":"urn:isbn:9784764907799"}]}]}