{"@context":{"owl":"http://www.w3.org/2002/07/owl#","bibo":"http://purl.org/ontology/bibo/","foaf":"http://xmlns.com/foaf/0.1/","rdfs":"http://www.w3.org/2000/01/rdf-schema#","prism":"http://prismstandard.org/namespaces/basic/2.0/","cinii":"http://ci.nii.ac.jp/ns/1.0/","dc":"http://purl.org/dc/elements/1.1/","dcterms":"http://purl.org/dc/terms/"},"@id":"https://ci.nii.ac.jp/ncid/BD18990553.json","@graph":[{"@id":"https://ci.nii.ac.jp/ncid/BD18990553#entity","@type":"bibo:Book","foaf:isPrimaryTopicOf":{"@id":"https://ci.nii.ac.jp/ncid/BD18990553.json"},"dc:title":[{"@value":"EUV時代の半導体リソグラフィ技術"},{"@value":"EUV ジダイ ノ ハンドウタイ リソグラフィ ギジュツ","@language":"ja-hrkt"}],"dc:creator":"岡崎信次, 鈴木章義, 上野巧著","dc:publisher":[{"@value":"技術評論社"}],"dcterms:extent":"351p","cinii:size":"21cm","dc:language":"jpn","dc:date":"2026","cinii:ncid":"BD18990553","cinii:ownerCount":"0","foaf:maker":[{"@id":"https://ci.nii.ac.jp/author/DA14057979#entity","@type":"foaf:Person","foaf:name":[{"@value":"岡崎, 信次"},{"@value":"オカザキ, シンジ","@language":"ja-hrkt"}]},{"@id":"https://ci.nii.ac.jp/author/DA14057990#entity","@type":"foaf:Person","foaf:name":[{"@value":"鈴木, 章義"},{"@value":"スズキ, アキヨシ","@language":"ja-hrkt"}]},{"@id":"https://ci.nii.ac.jp/author/DA05966288#entity","@type":"foaf:Person","foaf:name":[{"@value":"上野, 巧"},{"@value":"ウエノ, タクミ","@language":"ja-hrkt"}]}],"prism:publicationDate":["2026.5"],"cinii:note":["表現種別: テキスト (ncrcontent), 機器種別: 機器不用 (ncrmedia), キャリア種別: 冊子 (ncrcarrier)","参考文献: 章末"],"dc:subject":["NDC9:549.7","NDC10:549.7"],"foaf:topic":[{"@id":"https://ci.nii.ac.jp/books/search?q=%E3%83%AA%E3%82%BD%E3%82%B0%E3%83%A9%E3%83%95%E3%82%A3%E3%83%BC","dc:title":"リソグラフィー"},{"@id":"https://ci.nii.ac.jp/books/search?q=%E5%8D%8A%E5%B0%8E%E4%BD%93","dc:title":"半導体"}],"dcterms:isPartOf":[{"@id":"https://ci.nii.ac.jp/ncid/BA89795385#entity","dc:title":"現場の即戦力","@type":"bibo:Book"}],"dcterms:hasPart":[{"@id":"urn:isbn:9784297154622"}]}]}