Siマイクロマシニング先端技術

Author(s)
Bibliographic Information

Siマイクロマシニング先端技術

五十嵐伊勢美, 藍光郎編

サイエンスフオーラム, 1992.3

Title Transcription

Si マイクロマシニング センタン ギジュツ

Available at 13 libraries
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Details
  • NCID
    BN07636268
  • Country Code
    ja
  • Title Language Code
    jpn
  • Text Language Code
    jpn
  • Place of Publication
    東京
  • Pages/Volumes
    279p
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