{"@context":{"owl":"http://www.w3.org/2002/07/owl#","bibo":"http://purl.org/ontology/bibo/","foaf":"http://xmlns.com/foaf/0.1/","rdfs":"http://www.w3.org/2000/01/rdf-schema#","prism":"http://prismstandard.org/namespaces/basic/2.0/","cinii":"http://ci.nii.ac.jp/ns/1.0/","dc":"http://purl.org/dc/elements/1.1/","dcterms":"http://purl.org/dc/terms/"},"@id":"https://ci.nii.ac.jp/ncid/BN14485934.json","@graph":[{"@id":"https://ci.nii.ac.jp/ncid/BN14485934#entity","@type":"bibo:Book","foaf:isPrimaryTopicOf":{"@id":"https://ci.nii.ac.jp/ncid/BN14485934.json"},"dc:title":[{"@value":"半導体工場環境清浄化総合技術資料集"},{"@value":"ハンドウタイ コウジョウ カンキョウ セイジョウカ ソウゴウ ギジュツ シリョウシュウ","@language":"ja-hrkt"}],"dc:creator":"小野員正編","dc:publisher":[{"@value":"サイエンスフォーラム"}],"dcterms:extent":"410p","cinii:size":"31cm","dc:language":"jpn","dc:date":"1980","cinii:ncid":"BN14485934","cinii:ownerCount":"9","foaf:maker":[{"@id":"https://ci.nii.ac.jp/author/DA02603652#entity","@type":"foaf:Person","foaf:name":[{"@value":"小野, 員正"},{"@value":"オノ, カズマサ","@language":"ja-hrkt"}]}],"bibo:owner":[{"@id":"https://ci.nii.ac.jp/library/FA001415","@type":"foaf:Organization","foaf:name":"東北大学 附属図書館 工学分館","rdfs:seeAlso":{"@id":"https://opac.library.tohoku.ac.jp/opac/opac_openurl/?ncid=BN14485934"}},{"@id":"https://ci.nii.ac.jp/library/FA001652","@type":"foaf:Organization","foaf:name":"筑波大学 附属図書館 中央図書館","rdfs:seeAlso":{"@id":"https://www.tulips.tsukuba.ac.jp/mylimedio/search/search.do?target=local&mode=comp&ncid=BN14485934"}},{"@id":"https://ci.nii.ac.jp/library/FA001914","@type":"foaf:Organization","foaf:name":"東京農工大学 小金井図書館","rdfs:seeAlso":{"@id":"https://libwebservice.biblio.tuat.ac.jp/opac/opac_openurl/?ncid=BN14485934"}},{"@id":"https://ci.nii.ac.jp/library/FA002382","@type":"foaf:Organization","foaf:name":"静岡大学 附属図書館 浜松分館","rdfs:seeAlso":{"@id":"https://uni.lib.shizuoka.ac.jp/sul/resolver/svc_dat=suopac/rfr_id=https%3A%2F%2Fnii.ac.jp/?pid=ncid%3ABN14485934"}},{"@id":"https://ci.nii.ac.jp/library/FA002848","@type":"foaf:Organization","foaf:name":"大阪大学 附属図書館 総合図書館","rdfs:seeAlso":{"@id":"https://opac.library.osaka-u.ac.jp/opac/opac_openurl/?ncid=BN14485934"}},{"@id":"https://ci.nii.ac.jp/library/FA003170","@type":"foaf:Organization","foaf:name":"岡山大学 図書館","rdfs:seeAlso":{"@id":"http://webcat.lib.okayama-u.ac.jp/mylimedio/search/search.do?ncid=BN14485934"}},{"@id":"https://ci.nii.ac.jp/library/FA006066","@type":"foaf:Organization","foaf:name":"東京電機大学 総合メディアセンター 千住センター"},{"@id":"https://ci.nii.ac.jp/library/FA006893","@type":"foaf:Organization","foaf:name":"湘南工科大学 附属図書館","rdfs:seeAlso":{"@id":"https://lib.shonan-it.ac.jp/CARIN/CARINOPACLINK.HTM?OAL=BN14485934"}},{"@id":"https://ci.nii.ac.jp/library/FA020624","@type":"foaf:Organization","foaf:name":"天津図書館"}],"prism:publicationDate":["1980.12"],"cinii:note":["各章末:参考文献"],"dc:subject":["NDC8:549.8","NDLC:ND371","NDLC:M281"],"foaf:topic":[{"@id":"https://ci.nii.ac.jp/books/search?q=%E5%8D%8A%E5%B0%8E%E4%BD%93","dc:title":"半導体"},{"@id":"https://ci.nii.ac.jp/books/search?q=%E5%B7%A5%E7%A8%8B%E7%AE%A1%E7%90%86","dc:title":"工程管理"}],"dcterms:isPartOf":[{"@id":"https://ci.nii.ac.jp/ncid/BN14486030#entity","dc:title":"環境技術シリーズ","@type":"bibo:Book"}]}]}