Arai Kentaro
,
Kobayasi Daisuke
,
Murotani Hiroshi
,
Wakaki Moriaki
,
Matsusita Akinori
,
Kanaya Yasumasa
Recently, optical thin films have been increasingly needed in optical components. SiO_2 is most frequently used as a lowrefractive-index material of optical thin films. The stress of the film is an im …