Hosaka Makoto HOSAKA Makoto


Ritsumeikan University (1999年 CiNii収録論文より)

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  • X-ray Mask with SiC Membrane for LIGA Process  [in Japanese]

    UENO Hiroshi , HOSAKA Makoto , TABATA Osamu , KONISHI Satoshi , SUGIYAMA Susumu

    In order to develop a practical LIGA process, a high contrast X-ray mask with a SiC membrane was produced. The X-ray mask was composed of a 3μm thick Au as an absorber, a 2μm thick SiC as a memb …

    IEEJ Transactions on Sensors and Micromachines 119(4), 229-235, 1999-04

    J-STAGE  References (10) Cited by (1)

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