小倉 剛 OGURA Tsuyoshi

ID:9000000351138

東京電機大学 Tokyo Denki University (1999年 CiNii収録論文より)

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Articles:  1-2 of 2

  • Improvement of The Gas Selectivity of an Integrated Gas Sensor  [in Japanese]

    OGURA Tsuyosi , HARA Kazuhiro

    電気学会研究会資料. CS, 化学センサシステム研究会 1999(43), 69-74, 1999-11-12

    References (8)

  • An Integrated Gas Sensor Fabricated on a Silicon Substrate  [in Japanese]

    MURAYAMA Hidehisa , OGURA Tsuyoshi , HARA Kazuhiro

    We have developed an integrated thin-film gas sensor using semiconducting thin-films on an SiO<sub>2</sub> diaphragm, which is formed on an Si substrate. A micro heater is fabricated on th …

    IEEJ Transactions on Sensors and Micromachines 118(12), 602-607, 1998-12-01

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