Vaccaro Pablo VOCCARO Pablo

ID:9000001036017

ATR Adaptive Communications Research Laboratories (2003年 CiNii収録論文より)

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  • Array of Micromachined Components Fabricated Using "Micro-Origami" Method

    VOROB'EV Alexander , VOCCARO Pablo , KUBOTA Kazuyoshi , SARAVANAN Shanmugam , AIDA Tahito

    A two-dimensional array of self-positioning free-standing structures was fabricated using a new method of surface micromachining called “micro-origami”. The array is fabricated by epitaxia …

    Japanese Journal of Applied Physics 42(6), 4024-4026, 2003-06-30

    J-STAGE  References (6)

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