Ishii Hidekazu ISHII Hidekazu

ID:9000001496582

University of Tohoku, New Industry Creation Hatchery Center (NICHe) (2005年 CiNii収録論文より)

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Articles:  1-1 of 1

  • Adsorption Behavior of Various Fluorocarbon Gases on Silicon Wafer Surface

    HIDAKA Atsushi , YAMASHITA Satoru , ISHII Hidekazu , KATO Takeyoshi , TANAHASHI Naoki , KITANO Masafumi , GOTO Tetsuya , TERAMOTO Akinobu , SHIRAI Yasuyuki , OHMI Tadahiro

    Japanese journal of applied physics Pt. 1 Regular papers, brief communications & review papers 44(4), 2245-2251, 2005-04-30

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