HONDA Minoru

ID:9000002178155

Tokyo Electron AT Ltd. (2007年 CiNii収録論文より)

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Articles:  1-1 of 1

  • Nitrogen Profile Study for SiON Gate Dielectrics of Advanced DRAM

    MURAKAWA Shigemi , TAKEUCHI Masashi , HONDA Minoru , ISHIZUKA Shu-ichi , NAKANISHII Toshio , HIROTA Yoshihiro , SUGAWARA Takuya , TANAKA Yoshitsugu , AKASAKA Yasushi , TERAMOTO Akinobu , SUGAWA Shigetoshi , OHMI Tadahiro

    Extended abstracts of the ... Conference on Solid State Devices and Materials 2007, 1150-1151, 2007-09-19

    References (3)

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