Matsushita Electronics Industrial Co., Ltd. (2003年 CiNii収録論文より)

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  • Terahertz Time Domain Spectroscopy of Epitaxially Grown Silicon Germanium

    TABATA Jimpei , HIRANAKA Kouichi , SAITOH Tohru , NAGASHIMA Takeshi , HANGYO Masanori

    The DC resistivities of silicon germanium thin films on Si substrates by a non-contact and non-destructive technique using terahertz time domain spectroscopy (THz-TDS) agree with the values obtained b …

    IEICE transactions on electronics 86(10), 1994-1999, 2003-10-01

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