大木 厚志 OHKI Atsushi

ID:9000004966650

大阪酸素工業株式会社研究開発部:東北大学 Osaka Sanso Kogyo Ltd.:Tohoku University (1995年 CiNii収録論文より)

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  • Measuement and behavior of moisture and siloxane in silane gas  [in Japanese]

    OHKI Atsushi , OHMI Tadahiro

    We found that the detection limit of moisture in the silane gas for this APIMS is less than 1ppb. Moisture in the silane gas could not detect as moisture substance but as cluster with silane. We confi …

    Technical report of IEICE. SDM 95(206), 27-33, 1995-08-17

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