Kitamura Masaru KITAMURA Masaru

ID:9000005828223

Corporate Manufacturing Engineering Center, Toshiba Corporation (2002年 CiNii収録論文より)

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  • Focused Ion Beam Machining for Optical Microlens Fabrication

    KITAMURA Masaru , KOIKE Eijiro , TAKASU Noboru , NISHIMURA Tetsuro

    A three-dimensional feature has been fabricated into optical microlens by scanning a focused Ga ion beam. The lens shape is obtained using computer-controlled beam positions and dwell time during sput …

    Japanese Journal of Applied Physics 41(6), 4019-4021, 2002-06-15

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