Sasaki Yukichi SASAKI Yukichi

ID:9000006638580

Japan Fine Ceramics Center (2006年 CiNii収録論文より)

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  • Fabrication of Aluminum Nitride Thin Film and Its Oxidation Behavior

    YAMASHITA Masashi , SASAKI Yukichi , ITO Hiroki , OHSATO Hitoshi , SHIBATA Noriyoshi

    The oxidation behavior of an aluminum nitride (AlN) thin film, fabricated by reactive DC magnetron sputtering using aluminum metal as a target material was examined. The obtained AlN film was transpar …

    Journal of the Society of Materials Science, Japan 55(8), 785-789, 2006-08-15

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