Ohdaira Keisuke , Fujiwara Tomoko , Endo Yohei [他] , Nishizaki Shogo , Matsumura Hideki

We have succeeded in forming polycrystalline silicon (poly-Si) films with thicknesses of over 4 μm on soda lime glass by flash lamp annealing (FLA) of precursor amorphous Si (a-Si) films deposited by …

Japanese journal of applied physics 47(11), 8239-8242, 2008-11

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