Graduate School of Science and Engineering, University of Toyama (2010年 CiNii収録論文より)

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  • Nanostructure of WO_3 Sputtered Films Deposited at Various Gas Pressures

    SHAALAN Nagih M. , YAMAZAKI Toshinari , KIKUTA Toshio , KAWABATA Tokimasa

      Deep investigations were performed for further understanding of the nanostructure of sputtered WO<sub>3</sub> films. The as-deposited films consisted of fine crystallites of se …

    Journal of the Vacuum Society of Japan 53(3), 210-213, 2010-03-20

    J-STAGE  References (11)

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