高須 登 TAKASU Noboru

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  • Development of Lithography Based on Excimer Laser.  [in Japanese]

    KAMIYA Masashi , TAKASU Noboru , SEINO Takehisa , TORIUMI Masaki , MINAMIYAMA Takayuki

    This paper describes new laser-based lithography developed for use in a large scale area. An applied experimental exposure system consists of convex and concave spherical mirrors, a plane mirror, a ne …

    Journal of the Japan Society for Precision Engineering 59(4), 577-582, 1993

    J-STAGE 

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