MIURA Ken'ichi


Technology Research Institute of Osaka Prefecture (2009年 CiNii収録論文より)

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Articles:  1-1 of 1

  • Effects of Deposition Conditions on Adhesion of DLC Films Prepared by UBM Sputtering

    NAKAMURA Morimasa , MIURA Ken'ichi , MATSUOKA Takashi , HIRAYAMA Tomoko , MORIWAKI Ichiro

    The adhesion of diamondlike carbon (DLC) films deposited on SKD11 substrates by Unbalanced Magnetron sputtering (UBMS) of a metal Cr and graphite target was investigated. DLC films, consist of Cr/C gr …

    Journal of Solid Mechanics and Materials Engineering 3(5), 748-757, 2009


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