Degertekin Fahrettin-Levent DEGERTEKIN Fahrettin-Levent


Edwars L. Ginzton Laboratory, Stanford University (2000年 CiNii収録論文より)

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  • Silicon Micromachined Ultrasonic Transducers

    KHURI-YAKUB Butrus T. , CHENG Ching-Hsiang , DEGERTEKIN Fahrettin-Levent , ERGUN Sanli , HANSEN Sean , JIN Xue-Cheng , ORALKAN Omer

    This paper reviews capacitor micromachined ultrasonic transducers (cMUTs). Transducers for air-borne and immersion applications are made from parallel-plate capacitors whose dimensions are controlled …

    Japanese Journal of Applied Physics 39(5), 2883-2887, 2000-05-01

    J-STAGE  References (8) Cited by (2)

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