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  • Deposition of Ultra Fine Particles Using a Gas Jet

    KASHU Seiichiro , FUCHITA Eiji , MANABE Takeshi , HAYASHI Chikara

    Use of a gas jet for the transfer and deposition of metal or ceramic UFP has been studied. Individual particles having a diameter of less than 0.1 μm, are produced by the so-called gas evaporation met …

    Japanese journal of applied physics. Pt. 2, Letters 23(12), L910-L912, 1984-12-20

    応用物理学会 被引用文献10件