Shimizu Keiji SHIMIZU Keiji

ID:9000045949943

Device Analysis and Evaluation Technology Center, NEC Corporation (1998年 CiNii収録論文より)

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  • Imaging p-n Junctions by Scanning Auger Microscopy

    IDE Takashi , HIROSHIMA Seiichi , SHIMIZU Keiji

    We present a new technique for imaging p-n junctions in semiconductors based on Auger electron spectroscopy. By measuring fine Auger electron spectra of the semiconductor material (e.g., silicon LVV A …

    Japanese Journal of Applied Physics 37(8), L963-L965, 1998-08-01

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