HA Jowoong

ID:9000046014708

Inostek, Inc (2001年 CiNii収録論文より)

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  • Preferred Orientation Controlled Giant Grain Growth of Platinum Thin Films

    LEE Dong-Su , PARK Dong-Yeon , WOO Hyun-Jung , KIM Seung-Hyun , HA Jowoong , YOON Euijoon

    Platinum thin films were deposited by reactive magnetron sputtering on SiO<FONT SIZE="-1"><SUB>2</SUB></FONT>/Si substrates. Argon-oxygen sputtering gas mixtures were used to c …

    Japanese Journal of Applied Physics 40(1), L1-L3, 2001-01-01

    J-STAGE  References (8)

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