Matsuda Tomoko MATSUDA Tomoko

ID:9000046151863

ULSI Device Development Division, NEC Corporation (2002年 CiNii収録論文より)

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  • Luminescence Centers in Indium-Implanted Silicon

    TERASHIMA Koichi , MATSUDA Tomoko

    We measured photoluminescence (PL) spectra of silicon implanted with 150-keV In<FONT SIZE="-1"><SUP>+</SUP></FONT> to a dose of 1× 10<FONT SIZE="-1"><SUP>13&l …

    Japanese Journal of Applied Physics 41(3), 1203-1208, 2002-03-01

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