Park Jin-Goo PARK Jin-Goo

ID:9000046162125

Department of Metallurgy and Materials Engineering, Center for Electronic Materials and Components, Hanyang University (2002年 CiNii収録論文より)

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  • Passivation and Etching of Wafer Surfaces in HF-H_2O_2-IPA Solutions

    EOM Dae-Hong , KIM Ky-Sub , PARK Jin-Goo

    The etching behavior of silicon and oxide wafers was evaluated in HF solutions with and without the addition of H<FONT SIZE="-1"><SUB>2</SUB></FONT>O<FONT SIZE="-1"><S …

    Japanese Journal of Applied Physics 41(10), 5881-5886, 2002-10-15

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