TERAI Masayuki

ID:9000107344098

System Devices Research Laboratories, NEC Corporation (2005年 CiNii収録論文より)

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  • 1.2nm HfSiON/SiON Stacked Gate Insulators for 65-nm-Node MISFETs

    SAITOH Motofumi , TERAI Masayuki , IKARASHI Nobuyuki , WATANABE Heiji , FUJIEDA Shinji , IWAMOTO Toshiyuki , OGURA Takashi , MORIOKA Ayuka , WATANABE Koji , TATSUMI Toru , WATANABE Hirohito

    Japanese journal of applied physics Pt. 1 Regular papers, brief communications & review papers 44(4), 2330-2335, 2005-04-30

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