SASAGO Masaru

ID:9000107349980

Matsushita Electric Industrial Co. (2004年 CiNii収録論文より)

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Articles:  1-1 of 1

  • Bilayer Resist Method for Room-Temperature Nanoimprint Lithography

    NAKAMATSU Ken-ichiro , WATANABE Keiichiro , TONE Katsuhiko , KATASE Tetsuya , HATTORI Wataru , OCHIAI Yukinori , MATSUO Takahiro , SASAGO Masaru , NAMATSU Hideo , KOMURO Masanori , MATSUI Shinji

    Japanese Journal of Applied Physics Pt. 1 Regular Papers, Short Notes & Review Papers 43(6), 4050-4053, 2004-06-30

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