CiNii 国立情報学研究所 学術情報ナビゲータ[サイニィ]
Kannonzaki nature museum
ID:9000240087293
九州工業大学 Kyushu Institute of Technology, Department of Mechanical Information Science and Technology (2013年 CiNii収録論文より)
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ISHIHARA Daisuke , HORIE Tomoyoshi , NIHO Tomoya , BABA Akiyoshi
In this study a finite element analysis using hierarchal decompositions for the interaction of structural, fluidic and electrostatic fields is applied for vibration analyses of a MEMS structural compo …
TRANSACTIONS OF THE JAPAN SOCIETY OF MECHANICAL ENGINEERS Series A 79(804), 1291-1302, 2013
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