Kato Shigeki


The Institute of Physical and Chemical Research (1988年 CiNii収録論文より)

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  • Measurements of Energy Distributions in ECR Plasma

    Amemiya Hiroshi , Shimizu Kazuo , Kato Shigeki , Sakamoto Yuichi

    The electron energy distribution is measured in an ECR device for H<SUB>2</SUB> and N<SUB>2</SUB> plasmas as a function of pressure. The maximum measurable energy and the high- …

    Japanese Journal of Applied Physics 27pt2(5), L927-L930, 1988


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