Marui Takao

ID:9000252969953

Shimadzu Corporation (1989年 CiNii収録論文より)

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  • Development of Scanning μ-RHEED Microscopy for Imaging Polycrystal Grain Structure in LSI

    Tsubouchi Kazuo , Masu Kazuya , Tanaka Masanori , Hiura Yohei , Ohmi Tadahiro , Mikoshiba Nobuo , Hayashi Shigeki , Marui Takao , Teramoto Akira , Kajikawa Tetsuo , Soejima Hiroyoshi

    A new type of scanning μ-RHEED (reflection high energy electron diffraction) microscope has been developed. Three diffraction spots of a RHEED pattern were simultaneously selected for imaging. The sca …

    Japanese Journal of Applied Physics 28pt2(11), L2075-L2077, 1989

    J-STAGE 

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