Higashino Hidetaka


Central Research Laboratories, Matsushita Electric Industrial, Co., Ltd. (1989年 CiNii収録論文より)

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  • Effects of Ar Ion-Beam Etching on Gd–Ba–Cu–O Superconducting Thin Films

    Enokihara Akira , Higashino Hidetaka , Kohiki Shigemi , Setsune Kentaro , Wasa Kiyotaka

    The effects of Ar ion-beam etching were investigated for Gd–Ba–Cu–O superconducting thin films prepared on (100) MgO substrates at 650°C by rf magnetron sputtering. Etching at acceleration voltages be …

    Japanese Journal of Applied Physics 28pt2(3), L452-L455, 1989


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