Tsubouchi Nobuteru


Osaka National Research Institute (ONRI), AIST (2000年 CiNii収録論文より)

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  • Formation of Ultra High Pure Metal Thin Films by Means of a Dry Process

    Horino Yuji , Chayahara Akiyoshi , Kinomura Atsushi , Tsubouchi Nobuteru , Heck Claire , Abiko Kenji

    Metal thin films or materials surfaces have been playing an important roll in many practical applications such as VLSI technology. It is necessary to know both the bulk and surface properties of these …

    Materials Transactions, JIM 41(1), 28-30, 2000


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