松田 良信 MATSUDA Yoshinobu

ID:9000257983842

長崎大学工学部電気電子工学科 Department of Electrical and Electronic Engineering, Nagasaki University (2010年 CiNii収録論文より)

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  • Infrared Spectroscopy of Amorphous Carbon Film Deposition Process using Acetylene Plasma  [in Japanese]

    SHINOHARA Masanori , KAWAZOE Hiroki , INAYOSHI Takanori , KAWAKAMI Taka-aki , HARA Kojiro , MATSUDA Yoshinobu , FUJIYAMA Hiroshi , NITTA Yuki , NAKATANI Tatsuyuki

    We have investigated the acetylene-plasma deposition of amorphous carbon film using “in-situ”, “real-time” infrared absorption spectroscopy in the multiple internal reflection …

    Hyomen Kagaku 31(8), 400-404, 2010

    J-STAGE 

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