Horiuchi Toshiyuki


Tokyo Denki University (2005年 CiNii収録論文より)

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  • Multi-layer Resist Process Using Top-layer Resist as Phase Shifters

    Horiuchi Toshiyuki , Suzuki Yoshitaka , Usui Kumiko , Yoshida Toshikazu

    A new resolution enhancement method named SPLIT (Superimposition of Phase-shifting Layer for Image Transformation) is proposed. In the new method, top-layer resist patterns act as clear phase shifters …

    Journal of Photopolymer Science and Technology 18(3), 443-448, 2005


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