及川 将一 Oikawa Masakazu

ID:9000283812719

日本原子力機構 Japan Atomic Energy Agency (2007年 CiNii収録論文より)

Search authors sharing the same name

Articles:  1-1 of 1

  • High aspect micro mold machining with focused proton beam writing

    Yoshida Eiji , Nishikawa Hiroyuki , Uchiya Naoyuki , Furuta Yusuke , Kamiya Tomihiro , Ishii Yasuyuki , Sato Takahiro , Oikawa Masakazu , Haga Junnji

    This paper deals with surface structure-shaping process on EB resists by using proton beam writing (PBW). The PBW is a direct write lithographic technique to fabricate a deep mesa structure with sub-m …

    Proceedings of JSPE Semestrial Meeting 2007S(0), 253-254, 2007

    J-STAGE 

Page Top