Miki Shohei

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  • Relationship between passivation properties and band alignment in O

    Ikeno Norihiro , Yamashita Yoshihiro , Oji Hiroshi , Miki Shohei , Arafune Koji , Yoshida Haruhiko , Satoh Shin-ichi , Hirosawa Ichiro , Chikyow Toyohiro , Ogura Atsushi

    The passivation properties and band structures in aluminum oxide (AlO<inf>x</inf>) deposited by ozone-based atomic layer deposition (ALD) at room temperature on p-type crystalline silicon …

    Jpn. J. Appl. Phys. 54(8S1), 08KD19, 2015-07-17