Muraki Yuhei

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  • Effects of two-step heat treatment on properties of In

    Sato Yuichi , Aoshima Tadahiko , Muraki Yuhei

    A two-step heat treatment was carried out on a zirconium-doped indium oxide thin film epitaxially grown on a c-face sapphire substrate by a radio-frequency magnetron sputtering method. First, the as-g …

    Jpn. J. Appl. Phys. 54(8S1), 08KC09, 2015-07-10