Ellsion Christopher J.


McKetta Department of Chemical Engineering, The University of Texas at Austin (2015年 CiNii収録論文より)


論文一覧:  1件中 1-1 を表示

  • Surface Tension Driven Flow in a Low Molecular Weight Photopolymer

    Kim Chae Bin , Zhou Sunshine X. , Heilman Drew L. [他] , Janes Dustin W. , Ellsion Christopher J.

    Low molecular weight photopolymers are candidate materials for resists in Extreme Ultraviolet Lithography. The patterned chemical transformations used in photolithography generate a surface energy pat …

    Journal of Photopolymer Science and Technology 28(1), 67-71, 2015