CiNii 国立情報学研究所 学術情報ナビゲータ[サイニィ]
ID:9000300214315
防衛大学校 電気電子工学科 Department of Electrical and Electronic Engineering, National Defense Academy (2015年 CiNii収録論文より)
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Uchida Takashi , Kasai Hiroyuki , Tachiki Takashi
VO<sub>x</sub> precursor thin films were fabricated by metal-organic decomposition (MOD). Then, the films were fired with a temperature of 500-720°C, time of 5-20 min and pressure of 1.2-1 …
IEEJ Transactions on Fundamentals and Materials 135(8), 481-487, 2015
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