Lien Ting-Kuei

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  • Characteristics of a VHF H

    Lien Cheng-Yang , Chen Chia-Fu , Yang Ching-Lung , Kawai Yoshinobu , Chiu Kuo-Feng , Shi Jen-Bin , Huang Sy-Ruen , Wang Jui-Hao , Tsai Yu-Jer , Lien Ting-Kuei

    A capacitively coupled VHF H<inf>2</inf>plasma (60 MHz) was produced at high pressures, and plasma parameters were examined as a function of pressure and power at different discharge gaps …

    Jpn. J. Appl. Phys. 54(9), 096101, 2015-08-11

    応用物理学会

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