磯崎 瑛宏 ISOZAKI Akihiro

ID:9000329433537

東大 The University of Tokyo (2015年 CiNii収録論文より)

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  • 29pm1-E-1 Design of Beams for Multi-Axis Thermal Micro Actuator Using Single Layer  [in Japanese]

    NAGASAWA Toshiya , ISOZAKI Akihiro , IWASE Eiji

    We measured out-of-plane and in-plane deformations of beams in order to design beam shape which can deform out-of-plane or in-plane on a same substrate for multi-axis thermal actuator using single lay …

    The Proceedings of the Symposium on Micro-Nano Science and Technology 2015.7(0), _29pm1-E-1-_29pm1-E-1, 2015

    J-STAGE 

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