柏原 茂 Kashiwabara Shigeru

ID:9000391529493

防衛大学校 The National Defense Academy (1996年 CiNii収録論文より)

Search authors sharing the same name

Articles:  1-1 of 1

  • Off-axis Pulsed Laser Deposition Method Using a Perforated Screening Plate

    Inoue Narimi , Ozaki Tatsuya , Kashiwabara Shigeru , Toshima Shigetada , Fujimoto Ryozo

    A new off-axis pulsed laser deposition method using a perforated plate is developed in order to deposit droplet-free Ta<sub>2</sub>O<sub>5</sub> thin films. The droplet density …

    IEEJ Transactions on Fundamentals and Materials 116(6), 552-558, 1996

    J-STAGE 

Page Top