Kiyota Tetsuji

Articles:  1-1 of 1

  • Aluminum Film Deposition Using an Ultrahigh-Vacuum Sputtering System

    Kiyota Tetsuji , Toyoda Satoru , Tamagawa Kouichi , Yamakawa Hiroyuki

    Deposition of pure aluminum films on (100)Si and analysis of impurities during the sputtering process were carried out using an ultrahigh-vacuum sputtering system. A large amount of impurities desorbe …

    Japanese Journal of Applied Physics 32pt1(2), 930-934, 1993

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