Ohshita Yoshio

ID:9000401788343

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Chemical Vapor Deposition of GeSbTe Thin Films for Next-Generation Phase Change Memory

Machida Hideaki , Hamada Seichi , Horiike Takafumi , Ishikawa Masato , Ogura Atsushi , Ohshita Yoshio , Ohba Takayuki

Japanese Journal of Applied Physics 49(5), 05FF06-05FF06, 2010-05-20

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Japanese Journal of Applied Physics