Kenmotsu Youichi

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  • Direct micromachining of quartz glass plates using pulsed laser plasma soft x-rays

    MAKINMURA T. , Miyamoto Hisao , Kenmotsu Youichi , Murakami Kouichi , Niino Hiroyuki , 牧村 哲也 , 村上 浩一

    We have investigated direct micromachining of quartz glass, using pulsed laser plasma soft x-rays (LPSXs) having a potential capability of nanomachining because the diffraction limit is ~10 nm. The L …

    Applied physics letters 86(10), 103111, 2005-03

    IR  Cited by (4)

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