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涌井 伸二, 星野 雅史, 赤津 観 日本機械学会論文集Ｃ編 70 (696), 2235-2242, 2004

The precise positioning stage is ordinary mounted on the vibration isolated table. For its stage, PID compensator is commonly implemented in the control loop and its parameter tuning is carried out …

DOI Web Site 被引用文献1件

涌井 伸二 日本機械学会論文集Ｃ編 65 (636), 3252-3259, 1999

The precise positioning stage is ordinary mounted on the isolated table. For the positioning of its stage, PID compensator is widely used. There are many PID tuning methods, such as the ultimate …

DOI Web Site Web Site 被引用文献3件 参考文献5件