水野, 俊男, 向本, 徹, 横谷, 篤至, 川原, 公介, 二宮, 孝文, 沢田, 博司, 黒澤, 宏, Mizuno, Toshio, Mukumoto, Toru, Kawahara, Kosuke, Ninomiya, Takahumi, Sawada, Hiroshi, Kurosawa, Kou
宮崎大学工学部紀要
33
93-99,
2004-10
Silicon is the most basic material in the semiconductor industry, because it is used as a substrate of the integrated circuits (ICs). The silicon substrates are planed to reduce the thickness as …
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